JPH0437625Y2 - - Google Patents

Info

Publication number
JPH0437625Y2
JPH0437625Y2 JP1988061753U JP6175388U JPH0437625Y2 JP H0437625 Y2 JPH0437625 Y2 JP H0437625Y2 JP 1988061753 U JP1988061753 U JP 1988061753U JP 6175388 U JP6175388 U JP 6175388U JP H0437625 Y2 JPH0437625 Y2 JP H0437625Y2
Authority
JP
Japan
Prior art keywords
exhaust
chamber
processing
processing chamber
water droplets
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1988061753U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01167334U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988061753U priority Critical patent/JPH0437625Y2/ja
Publication of JPH01167334U publication Critical patent/JPH01167334U/ja
Application granted granted Critical
Publication of JPH0437625Y2 publication Critical patent/JPH0437625Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Prevention Of Fouling (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP1988061753U 1988-05-11 1988-05-11 Expired JPH0437625Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988061753U JPH0437625Y2 (en]) 1988-05-11 1988-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988061753U JPH0437625Y2 (en]) 1988-05-11 1988-05-11

Publications (2)

Publication Number Publication Date
JPH01167334U JPH01167334U (en]) 1989-11-24
JPH0437625Y2 true JPH0437625Y2 (en]) 1992-09-03

Family

ID=31287401

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988061753U Expired JPH0437625Y2 (en]) 1988-05-11 1988-05-11

Country Status (1)

Country Link
JP (1) JPH0437625Y2 (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020175315A (ja) * 2019-04-16 2020-10-29 ヤマト科学株式会社 ドラフトチャンバおよびドラフトチャンバの風量制御方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS559119U (en]) * 1978-06-30 1980-01-21
JPS59135133U (ja) * 1983-02-26 1984-09-10 株式会社大氣社 隔離作業用キヤビネツト
JPH0529076Y2 (en]) * 1985-12-23 1993-07-26

Also Published As

Publication number Publication date
JPH01167334U (en]) 1989-11-24

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